n.影印石版术，照相平版

contact photolithography → 接触光蚀刻
precision photolithography → 精密光刻
relaxed registration photolithography → 不严格对准光刻
projection photolithography → 投影光刻法
photolithography mask layers → 光石版照相罩幕层
e-beam photolithography → 电子束显影法；电子束微影术
photolithography limitation → 光刻极限
Photolithography process → 光刻工艺
photolithography technique → 光刻工艺

【Noun】

1. a planographic printing process using plates made from a photographic image